红外与毫米波学报2021，Vol.40Issue(2)：161-165,5.DOI:10.11972/j.issn.1001-9014.2021.02.004
液相外延生长过程中外延层厚度的卷积计算方法
A convolution approach for the epilayer thickness in liquid phase epitaxial growth
摘要
Abstract
The relation between the film thickness and the growth conditions in the liquid phase epitaxy(LPE)process is discussed. A convolution approach for the thickness is developed on the assumption that the growth rate is determined by the solute diffusion process. Using this convolution expression,the relations between thickness, growth time and cooling rate can be obtained for various LPE techniques. Moreover,the convolution algorithm can also be used to deal with some complex growth conditions,such as nonuniform cooling rate,nonlinearity of the liquidus curve and the finite growth solution.关键词
生长模型/扩散/液相外延Key words
growth models/diffusion/liquid phase epitaxy分类
数理科学引用本文复制引用
魏彦锋,孙权志..液相外延生长过程中外延层厚度的卷积计算方法[J].红外与毫米波学报,2021,40(2):161-165,5.基金项目
Supported by National Natural Science Foundation of China(62004206), （62004206）
