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Machine learning powered ellipsometry

Jinchao Liu Di Zhang Dianqiang Yu Mengxin Ren Jingjun Xu

光：科学与应用（英文版）2021，Vol.10Issue(4)：582-588,7.

Machine learning powered ellipsometry

Jinchao Liu ¹Di Zhang ²Dianqiang Yu ¹Mengxin Ren ¹Jingjun Xu¹

作者信息

1. The Key Laboratory of Weak-Light Nonlinear Photonics,Ministry of Education,School of Physics and TEDA Applied Physics Institute,Nankai University,Tianjin 300071,China
2. College of Artificial Intelligence,Nankai University,Tianjin 300071,China
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摘要

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Jinchao Liu,Di Zhang,Dianqiang Yu,Mengxin Ren,Jingjun Xu..Machine learning powered ellipsometry[J].光：科学与应用（英文版）,2021,10(4):582-588,7.

基金项目

This work was supported by the National Key R&D Program of China(2017YFA0305100,2017YFA0303800,and 2019YFA0705000) （2017YFA0305100,2017YFA0303800,and 2019YFA0705000）

National Natural Science Foundation of China(92050114,62076140,91750204,61775106,11904182,61633012,11711530205,11374006,12074200,and 11774185) （92050114,62076140,91750204,61775106,11904182,61633012,11711530205,11374006,12074200,and 11774185）

Guangdong Major Project of Basic and Applied Basic Research(2020B0301030009) （2020B0301030009）

111 Project(B07013) （B07013）

PCSIRT(IRT0149) （IRT0149）

Open Research Program of Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province （）

Tianjin Youth Talent Support Program （）

Fundamental Research Funds for the Central Universities(010-63201003,010-63201008,and 010-63201009) （010-63201003,010-63201008,and 010-63201009）

Hundred Young Academic Leaders Program of Nankai University.We would like to thank Tsinghua University and Prof.Xuhan Guo of Shanghai Jiaotong University for film deposition. （）

光：科学与应用（英文版）

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ISSN：2095-5545

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