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3-μm中红外偏振无关且CMOS兼容的石墨烯调制器

陆荣国 王小菊 刘永 林瑞 沈黎明 蔡松炜 王玉姣 陈进湛 杨忠华 吕江泊 周勇

红外与毫米波学报2021,Vol.40Issue(3):297-301,5.
红外与毫米波学报2021,Vol.40Issue(3):297-301,5.DOI:10.11972/j.issn.1001-9014.2021.03.003

3-μm中红外偏振无关且CMOS兼容的石墨烯调制器

3-μm mid-infrared polarization-independent and CMOS-compatible graphene modulator

陆荣国 1王小菊 1刘永 1林瑞 1沈黎明 1蔡松炜 1王玉姣 1陈进湛 1杨忠华 2吕江泊 1周勇1

作者信息

  • 1. 电子薄膜与集成器件国家重点实验室,光电科学与工程学院,电子科技大学,四川成都610054
  • 2. 重庆微电子中心,重庆401332
  • 折叠

摘要

Abstract

This paper proposes a 3-μm mid-infrared band polarization-independent and CMOS-compatible gra?phene modulator,which mainly includes two parts:the mode conversion structure and the graphene modulator. This modulator not only fulfills the requirement of compatibility with CMOS,but also can achieve polarization-in?dependent modulation of the fundamental mode. Simulation results show that this modulator can achieve an ex?tinction ratio(ER)higher than 20 dB in the mid-infrared band from 2. 95μm to 3. 05μm,the insert loss for both TE and TM modes are less than 1. 3 dB,and polarization-dependent loss is less than 1. 09 dB. Through the calcu?lation,the 3 dB bandwidth up to 9. 47 GHz can be obtained when the length of the device is 420μm.

关键词

石墨烯调制器/偏振无关/模式转换/中红外

Key words

graphene modulator/polarization-independent/mode conversion/mid-infrared

分类

数理科学

引用本文复制引用

陆荣国,王小菊,刘永,林瑞,沈黎明,蔡松炜,王玉姣,陈进湛,杨忠华,吕江泊,周勇..3-μm中红外偏振无关且CMOS兼容的石墨烯调制器[J].红外与毫米波学报,2021,40(3):297-301,5.

基金项目

Supported by the National Key Research and Development Program of China(2018YFE0201901) (2018YFE0201901)

the Program for International S&T Co-operation Projects of Sichuan Province(2020YFH0108) (2020YFH0108)

the National Nature Science Foundation of China(61435010,61307070,61421002,61704021) (61435010,61307070,61421002,61704021)

the Fundamental Research Funds for the Central Universities(ZYGX2019J046). (ZYGX2019J046)

红外与毫米波学报

OA北大核心CSCDCSTPCDSCI

1001-9014

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