红外与毫米波学报2021，Vol.40Issue(3)：302-307,6.DOI:10.11972/j.issn.1001-9014.2021.03.004
脉冲激光沉积法制备的单层MoS2薄膜变温光响应研究
Temperature-dependent photoresponse of monolayer MoS2 film grown by pulsed laser deposition
摘要
Abstract
We report the preparation and photoresponse of MoS2 films with different layers grown on c-Al2O3 bypulsed laser deposition(PLD). The phonon modes and crystallographic orientation discussed by Raman scatter?ing and X-ray diffraction(XRD)prove that the MoS2 films are of pure 2H-phase. The S/Mo ratio of film is identi?fied as 1. 92:1 derived by X-ray photoelectron(XPS)experiments. The blue and red shifts of the Mo 3d peaks for XPS data indicate the existence of oxidation and sulfur defects in the films. Moreover,by Raman and photolu?minescence(PL)mapping,the film thickness is proven to be uniform. The temperature-dependent photoresponse of monolayer MoS2 film indicates that the temperature plays an important role in the photoresponse intensity and response time. The present results can provide a reference for further improving the performance of MoS2-based photodetectors.关键词
二硫化钼/脉冲激光沉积/光致发光/光响应Key words
molybdenum disulfide/pulsed laser deposition/photoluminescence/photoresponse分类
数理科学引用本文复制引用
谢明章,李留猛,李明,叶艳,张金中,姜凯,商丽燕,胡志高,褚君浩..脉冲激光沉积法制备的单层MoS2薄膜变温光响应研究[J].红外与毫米波学报,2021,40(3):302-307,6.基金项目
Supported by the National Key R&D Program of China(2018YFB0406500,2019YFB2203400) （2018YFB0406500,2019YFB2203400）
the Natural Science Foundation of Chi-na(91833303,61974043,61674057) （91833303,61974043,61674057）
Projects of Science and Technology Commission of Shanghai Municipality(18JC1412400,18YF1407200,18YF1407000,19511120100). （18JC1412400,18YF1407200,18YF1407000,19511120100）
