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First-principles study of the growth and diffusion of B and N atoms on the sapphire surface with h-BN as the buffer layer

Jianyun Zhao Xu Li Ting Liu Yong Lu Jicai Zhang

半导体学报(英文版)2021,Vol.42Issue(8):69-75,7.
半导体学报(英文版)2021,Vol.42Issue(8):69-75,7.DOI:10.1088/1674-4926/42/8/082801

First-principles study of the growth and diffusion of B and N atoms on the sapphire surface with h-BN as the buffer layer

First-principles study of the growth and diffusion of B and N atoms on the sapphire surface with h-BN as the buffer layer

Jianyun Zhao 1Xu Li 1Ting Liu 1Yong Lu 1Jicai Zhang1

作者信息

  • 1. College of Mathematics and Physics,Beijing University of Chemical Technology,Beijing 100029,China
  • 折叠

摘要

关键词

hexagonal boron nitride/buffer layer/first-principles calculations/molecular dynamics

Key words

hexagonal boron nitride/buffer layer/first-principles calculations/molecular dynamics

引用本文复制引用

Jianyun Zhao,Xu Li,Ting Liu,Yong Lu,Jicai Zhang..First-principles study of the growth and diffusion of B and N atoms on the sapphire surface with h-BN as the buffer layer[J].半导体学报(英文版),2021,42(8):69-75,7.

基金项目

This work was partly supported by the National Natural Sci-ence Foundation of China(61874007,12074028),the Beijing Municipal Natural Science Foundation(4182046),Shandong Provincial Major Scientific and Technological Innovation Project(2019JZZY010209),Key-area research and the develop-ment program of Guangdong Province(2020B010172001),and the Fundamental Research Funds for the Central Universit-ies(buctrc201802,buctrc201830,buctrc202127). (61874007,12074028)

半导体学报(英文版)

OACSCDCSTPCDEI

1674-4926

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