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Coupled-ridge waveguide quantum cascade laser array lasing at λ～5μm

Pengchang Yang Lijun Wang Shuman Liu Fengqi Liu Jinchuan Zhang Zenghui Gu Chuanwei Liu Yue Zhao Fengmin Cheng Shenqiang Zhai Ning Zhuo Junqi Liu

半导体学报（英文版）2021，Vol.42Issue(9)：63-67,5.

半导体学报（英文版）2021，Vol.42Issue(9)：63-67,5.DOI:10.1088/1674-4926/42/9/092901

Coupled-ridge waveguide quantum cascade laser array lasing at λ～5μm

Pengchang Yang ¹Lijun Wang ²Shuman Liu ²Fengqi Liu ³Jinchuan Zhang ²Zenghui Gu ³Chuanwei Liu ²Yue Zhao ³Fengmin Cheng ²Shenqiang Zhai ²Ning Zhuo ³Junqi Liu²

作者信息

1. School of Microelectronics,University of Chinese Academy of Sciences,Beijing 100049,China
2. Key Laboratory of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences,Beijing Key Laboratory of Low Dimensional Semiconductor Materials and Devices,Beijing 100083,China
3. School of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China
折叠

摘要

关键词

quantum cascade laser array/coupled-ridge waveguide/mid-infrared

Key words

quantum cascade laser array/coupled-ridge waveguide/mid-infrared

引用本文复制引用

Pengchang Yang,Lijun Wang,Shuman Liu,Fengqi Liu,Jinchuan Zhang,Zenghui Gu,Chuanwei Liu,Yue Zhao,Fengmin Cheng,Shenqiang Zhai,Ning Zhuo,Junqi Liu..Coupled-ridge waveguide quantum cascade laser array lasing at λ～5μm[J].半导体学报（英文版）,2021,42(9):63-67,5.

基金项目

This work was supported by National Basic Research Pro-gram of China (Grant Nos.2018YFA0209103,2018YFB2200504),in part by National Natural Science Founda-tion of China (Grant Nos.61991430,61774146,61790583,61734006,61835011,61674144,61774150,61805168),in part by Beijing Municipal Science & Technology Commission(Grant No.Z201100004020006),and in part by the Key projects of the Chinese Academy of Sciences (Grant No.2018147,Grant No.YJKYYQ20190002,Grant No.QYZDJ-SSW-JSC027,Grant No.XDB43000000,Grant No.ZDKYYQ20200006).The authors would appreciate P.Liang and Y.Hu for their help in the device fabrication processing. （Grant Nos.2018YFA0209103,2018YFB2200504）

半导体学报（英文版）

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ISSN：1674-4926

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