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Work Function Optimization Technology of Indium Tin Oxide Films

Bo Zhang Zhibo Zhang Xintao Guo Ya'nan Yang Ying Liu Lei Yang Jiaqi Zhu

哈尔滨工业大学学报（英文版）2021，Vol.28Issue(4)：33-39,7.

Work Function Optimization Technology of Indium Tin Oxide Films

Bo Zhang ¹Zhibo Zhang ²Xintao Guo ¹Ya'nan Yang ²Ying Liu ¹Lei Yang ³Jiaqi Zhu²

作者信息

1. Department of Materials Research,AVIC Manufacturing Technology Institute,Beijing 100024,China
2. National Key Laboratory of Science and Technology on Advanced Composite in Special Environments,Harbin Institute of Technology,Harbin 150001,China
3. Center of Analysis and Measurement,Harbin Institute of Technology,Harbin 150001,China
折叠

摘要

关键词

work function/indium tin oxide/low temperature crystallization/plasma exposure

Key words

work function/indium tin oxide/low temperature crystallization/plasma exposure

分类

化学化工

引用本文复制引用

Bo Zhang,Zhibo Zhang,Xintao Guo,Ya'nan Yang,Ying Liu,Lei Yang,Jiaqi Zhu..Work Function Optimization Technology of Indium Tin Oxide Films[J].哈尔滨工业大学学报（英文版）,2021,28(4):33-39,7.

基金项目

Sponsored by the National Science Fund for Distinguished Young Scholars of China(Grant No.51625201). （Grant No.51625201）

哈尔滨工业大学学报（英文版）

ISSN：1005-9113

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