光：科学与应用（英文版）2014，Vol.3Issue(1)：P.298-303,6.DOI:10.1038/lsa.2014.26
Wafer-scale fabricated thermo-pneumatically tunable microlenses
Wei Zhang 1Hans Zappe 1Andreas Seifert1
作者信息
- 1. Department of Microsystems Engineering,University of Freiburg,79110 Freiburg,Germany
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摘要
关键词
optofluidics/thermo-pneumatic actuation/tunable microlens/wafer-scale fabrication分类
信息技术与安全科学引用本文复制引用
Wei Zhang,Hans Zappe,Andreas Seifert..Wafer-scale fabricated thermo-pneumatically tunable microlenses[J].光：科学与应用（英文版）,2014,3(1):P.298-303,6.
