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Spatial separation effects in a guiding procedure in a modified ion-beam-sputtering process

Sina Malobabic Marco Jupé Detlev Ristau

光：科学与应用（英文版）2015，Vol.4Issue(1)：P.109-116,8.

光：科学与应用（英文版）2015，Vol.4Issue(1)：P.109-116,8.DOI:10.1038/lsa.2016.44

Spatial separation effects in a guiding procedure in a modified ion-beam-sputtering process

Sina Malobabic ¹Marco Jupé ¹Detlev Ristau¹

作者信息

1. Laser Zentrum Hannover e.V.,Hollerithallee 8,D-30419 Hannover,Germany QUEST:Centre for Quantum Engineering and Space-Time Research,Leibniz Universität Hannover,Hannover,Germany
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摘要

关键词

EM field separation/ion beam sputtering/plasma guiding

分类

矿业与冶金

引用本文复制引用

Sina Malobabic,Marco Jupé,Detlev Ristau..Spatial separation effects in a guiding procedure in a modified ion-beam-sputtering process[J].光：科学与应用（英文版）,2015,4(1):P.109-116,8.

基金项目

This work was supported by the Deutsche Forschungsgemeinschaft(DFG)within the framework of the Cluster of Excellence QUEST Project 201. （DFG）

光：科学与应用（英文版）

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ISSN：2095-5545

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