华侨大学学报（自然科学版）2021，Vol.42Issue(5)：561-570,10.DOI:10.11830/ISSN.1000-5013.202104065
蓝宝石衬底表面微观缺陷检测与深度估计
Detection and Depth Estimation of Microdefects on Sapphire Substrate Surface
摘要
Abstract
Using the linear-array camera scanning technology and the vertical-scanning white-light interference technology,the microdefects on sapphire substrate surfaces were located and their depths were assessed. First,the full-field scanning was carried out with linear-array camera measurement equipment to obtain full-field images of the substrate;then,the position coordinates of the microdefects were detected by extracting their centroid coordinates;finally,the three-dimensional morphology of microdefects was reconstructed to iden-tify the type of defects,and extract the defect depth using white-light interferometry system.It takes only a-bout 10 seconds to scan a diameter 10.16 cm sapphire substrate surface by the linear-array camera measure-ment system.It takes about 76 seconds to detect one microdefect by the white-light interferometry system. The deepest defect was with a depth of 7.09μm,and a total of 13 defects (10 pits and 3 cracks or scratches) were identified and localized.The experimental results show that the proposed method can accurately locate microdefects and extract their depths on sapphire substrate surfaces.关键词
蓝宝石衬底/微观缺陷定位/深度估计/线阵相机/白光干涉技术Key words
sapphire substrate/microdefect localization/depth estimation/linear-array camera/white-light interferometry分类
信息技术与安全科学引用本文复制引用
崔长彩,杨成,李子清..蓝宝石衬底表面微观缺陷检测与深度估计[J].华侨大学学报（自然科学版）,2021,42(5):561-570,10.基金项目
国家自然科学基金资助项目(51575197) （51575197）
福建省科技计划项目(2018I0012) （2018I0012）
