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Resolving Deep Sub-Wavelength Scattering of Nanoscale Sidewalls Using Parametric Microscopy

Nagendra Parasad Yadav Ji-Chuan Xiong Wei-Ping Liu Wei-Ze Wang Yun Cao Ashish Kumar Xue-Feng Liu

电子科技学刊2021，Vol.19Issue(3)：233-242,10.

电子科技学刊2021，Vol.19Issue(3)：233-242,10.DOI:10.1016/j.jnlest.2021.100094

Resolving Deep Sub-Wavelength Scattering of Nanoscale Sidewalls Using Parametric Microscopy

Nagendra Parasad Yadav ¹Ji-Chuan Xiong ²Wei-Ping Liu ¹Wei-Ze Wang ¹Yun Cao ³Ashish Kumar ⁴Xue-Feng Liu¹

作者信息

1. School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing 210094
2. School of Electrical and Electronics Information Technology, Hubei Polytechnic University, Huangshi 435003
3. College of Physics and Electronic Engineering, Chongqing Normal University, Chongqing 401331
4. School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing 210094
折叠

摘要

关键词

Light scattering/nanoscale microscopy/polarization/semiconductor

Key words

Light scattering/nanoscale microscopy/polarization/semiconductor

引用本文复制引用

Nagendra Parasad Yadav,Ji-Chuan Xiong,Wei-Ping Liu,Wei-Ze Wang,Yun Cao,Ashish Kumar,Xue-Feng Liu..Resolving Deep Sub-Wavelength Scattering of Nanoscale Sidewalls Using Parametric Microscopy[J].电子科技学刊,2021,19(3):233-242,10.

基金项目

This work was supported by the National Major Scientific Instruments and Equipment Development Project under Grant No.61827814 （）

the National Natural Science Foundation of China(NSFC)under Grant No.61501239 （NSFC）

the NSFC International Young Scientist Research Fund under Grant No.61750110520 （）

the Hubei Polytechnic University Laboratory Fund under Grant No. 19XJK24R （）

the Jiangsu Postdoc Research Fund under Grant No. 1601001B （）

the Beijing Natural Science Foundation under Grant No.Z190018 （）

the Fundamental Research Funds for the Central Universities under Grant No.30920010011 （）

the UK Engineering and Physical Sciences Research Council under Grant No. EP/R042578/1. （）

电子科技学刊

OACSCD

ISSN：1674-862X

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