中南民族大学学报（自然科学版）2021，Vol.40Issue(5)：496-503,8.DOI:10.12130/znmdzk.20210507
钛镁共掺氧化锌透明导电薄膜的制备及其光电性能
Preparation and optoelectrical performance of transparent conducting titanium-magnesium codoped zinc oxide thin films
摘要
Abstract
The titanium-magnesium codoped zinc oxide ( TMZO ) transparent conductive oxide ( TCO ) thin films were deposited by magnetron sputtering technique. The effect of gas pressure on the optical and electrical performance of the thin films was investigated by ultraviolet-visible spectrometer, four-point probe and optical characterization methods. The results show that all the deposited films possess the normal dispersion characteristics in the visible region, and the refractive index dispersion curves of the thin films obey the single oscillator model. The gas pressure significantly affects the optoelectrical performance of the deposited films. When the gas pressure is 0. 6 Pa, the TMZO thin film exhibits the best optoelectrical performance, with the lowest resistivity of 1. 60 × 10-2 Ω· cm, the highest average transmittance in the visible range of 84. 25 ％ and the maximum figure of merit of 3. 65×102 Ω-1·cm-1.关键词
透明导电氧化物/掺杂氧化锌/薄膜/光电性能Key words
transparent conductive oxide/doped zinc oxide/thin film/optoelectronic performance分类
信息技术与安全科学引用本文复制引用
钟志有,田雨,龙浩,陈首部,杨春勇..钛镁共掺氧化锌透明导电薄膜的制备及其光电性能[J].中南民族大学学报（自然科学版）,2021,40(5):496-503,8.基金项目
国家自然科学基金资助项目(12075322) （12075322）
