红外与毫米波学报2021，Vol.40Issue(5)：634-637,4.DOI:10.11972/j.issn.1001-9014.2021.05.009
基于T形阳极GaAs肖特基二极管薄膜集成电路工艺的664 GHz次谐波混频器
664 GHz sub harmonic mixer based on"T"anode GaAs SBD membrane circuit
摘要
Abstract
664 GHz sub harmonic mixer for ice cloud detection was designed and fabricated,based on 0. 5 μm"T"anode GaAs SBD membrane integrated process with thickness of 5μm. Parasitic parameters of"T"anode de-sign were analyzed and membrane process was developed to improve high frequency performance. The mixer was characterized in 664 GHz receiver setup. Double side band conversion loss of the mixer was 9. 9 dB at 664 GHz room temperature.关键词
砷化镓肖特基二极管/薄膜电路/次谐波混频器Key words
GaAs SBD/membrane circuit/sub harmonic mixer分类
信息技术与安全科学引用本文复制引用
牛斌,钱骏,范道雨,王元庆,梅亮,戴俊杰,林罡,周明,陈堂胜..基于T形阳极GaAs肖特基二极管薄膜集成电路工艺的664 GHz次谐波混频器[J].红外与毫米波学报,2021,40(5):634-637,4.基金项目
Supported by the national key R&D program of China(2018YFF0109301) （2018YFF0109301）
