红外与毫米波学报2021，Vol.40Issue(5)：680-684,5.DOI:10.11972/j.issn.1001-9014.2021.05.015
纳米盘光子晶体增强Si+/Ni+离子共注入SOI的光致发光
Effective enhancement of the photoluminescence from the Si+/Ni+ions co-implanted SOI by directly constructing the nanodisk photonic crystals
摘要
Abstract
An effective enhancement of the photoluminescence from the Si+/Ni+ions co-implanted silicon-on-insu-lator(SOI)by directly constructing the Au nanodisk-array photonic crystals is reported. The finite-difference time-domain method(FDTD)was employed to design and analyze the luminescence amplification of the metal film with a photonic crystal structure for luminesce from the optical defects in the SOI. The Langmuir-Blodgett (LB)method and inductively coupled plasma(ICP)etching were used to fabricate the etched Au-nanostructure photonic crystal directly on the top of SOI wafers. It indicates that the introduction of polystyrene(PS)spheres can effectively improve the luminescent efficiency in the near infrared waveband. This photonic crystal with sim-ply fabricating processes and high efficiency exhibits great application on the optical quantum of Si-based photon-ics.关键词
红外物理/光致发光/离子共注入/绝缘体上硅/光子晶体/等离子体Key words
infrared physics/photoluminescence/ion co-implantation/silicon on insulator/photonic crystal/plasma分类
数理科学引用本文复制引用
童浩辰,王荣飞,文小明,杨宇,崔昊杨,王茺,唐淑敏,叶书鸣,段潇潇,李晓南,谢继阳,张璐然,杨杰,邱峰..纳米盘光子晶体增强Si+/Ni+离子共注入SOI的光致发光[J].红外与毫米波学报,2021,40(5):680-684,5.基金项目
Supported by the National Natural Science Foundation of China(11564043,11504322,11704330),Joint Foundation of Provincial Sci?ence and Technology Department-Double First-class Construction of Yunnan University(2019FY003016),the Reserve Talents of Academic and Technical Leader Project(2017HB001),Young Top Talent Project(YNWR-QNBJ-2018-229),and the Application Basic Research Project(2019FB130)of Yunnan Province. （11564043,11504322,11704330）
