中国光学2021，Vol.14Issue(6)：1435-1450,16.DOI:10.37188/CO.2021-0087
基于粒子群算法离轴多反光学系统设计
Design of off-axis multi-reflective optical system based on particle swarm optimization
摘要
Abstract
An initial construction satisfying aberration balance and multi-constraint control is essential for the design of an off-axis multi-reflective optical system with minimal aberration. In this paper, a mathematical model for calculating the initial structure of off-axis multi-reflective is established based on the grouping design method combining spatial ray tracing and aberration correction, and an improved Particle Swarm Op-timization (PSO) is proposed to solve the initial structure problem of an off-axis multi-reflective optical sys-tem. The PSO of natural selection with shrinkage factor is applied to improve calculation accuracy and design efficiency, so as to obtain the initial structure of the off-axis multi-reflection optical system. In the last part of this paper, taking an Extreme UltraViolet (EUV) lithography projection objective with six-mirror reflective aspheric mirrors as an example, the reliability and effectiveness of this method are verified. A 0.33 numeric-al aperture EUV lithographic objective with wave-front error better than 1/80λ (λ=13.5 nm) RMS is achieved.关键词
光学设计/几何光学/像差理论/粒子群算法Key words
optical design/geometric optics/aberration theory/particle swarm optimization分类
信息技术与安全科学引用本文复制引用
吴越,王丽萍,于杰,张旭,金春水..基于粒子群算法离轴多反光学系统设计[J].中国光学,2021,14(6):1435-1450,16.基金项目
国家科技重大专项(No.2018ZX02102002)Supported by National Science and Technology Major Project(No.2018ZX02102002) （No.2018ZX02102002）
