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8T CMOS图像传感器质子辐照效应研究

傅婧 李豫东 冯婕 文林 郭旗

原子能科学技术2021,Vol.55Issue(12):2128-2134,7.
原子能科学技术2021,Vol.55Issue(12):2128-2134,7.DOI:10.7538/yzk.2021.youxian.0530

8T CMOS图像传感器质子辐照效应研究

Degradation Characteristic of Proton Irradiated 8T CMOS Image Sensor

傅婧 1李豫东 2冯婕 3文林 1郭旗2

作者信息

  • 1. 中国科学院新疆理化技术研究所,新疆乌鲁木齐830011
  • 2. 新疆电子信息材料与器件重点实验室,新疆乌鲁木齐830011
  • 3. 中国科学院大学,北京100049
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摘要

Abstract

The proton irradiation experiments with different energy were carried out on the new 8-transistor (8T) CMOS image sensors.As the total ionization dose (TID)effect and displacement damage dose (DDD) effect are caused simultaneously after pro-ton irradiation,the degradation of device performance is more complicated.In order to specifically distinguish the main factor causing the degradation of different parameters,the equivalent TID method and equivalent DDD method were adopted.It is concluded that DDD mainly causes the degradation of dark current,while TID mainly causes the degradation of spectral responsivity,which has a guiding effect on the hardening design of image sensor in the irradiation environment.

关键词

CMOS图像传感器/钳位光电二极管/质子辐照/电离总剂量/位移损伤剂量

Key words

CMOS image sensor/pinned photodiode/proton irradiation/total ionization dose/displacement damage dose

分类

数理科学

引用本文复制引用

傅婧,李豫东,冯婕,文林,郭旗..8T CMOS图像传感器质子辐照效应研究[J].原子能科学技术,2021,55(12):2128-2134,7.

基金项目

Supported by National Natural Science Foundation of China (11805269),Tianshan Youth Project of Autonomous Region under Grant (2019Q085),Key Deployment Projects of Chinese Academy of Sciences (ZDRW-CN-2020-2) (11805269)

原子能科学技术

OA北大核心CSCDCSTPCD

1000-6931

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