电子科技学刊2021，Vol.19Issue(4)：319-334,16.DOI:10.1016/j.jnlest.2021.100120
Effects of Material and Dimension on TCF, Frequency, and Q of Radial Contour Mode AlN-on-Si MEMS Resonators
Effects of Material and Dimension on TCF, Frequency, and Q of Radial Contour Mode AlN-on-Si MEMS Resonators
Thi Dep Ha1
作者信息
- 1. Faculty of Electronics Technology, Industrial University of Ho Chi Minh City, Ho Chi Minh City 70000
- 折叠
摘要
关键词
Anisotropic/contour mode/doping/gyroscope/microelectromechanical systems (MEMS) resonator/piezoelectric/temperature coefficient of frequency (TCF)/temperature compensation/thin-film piezoelectric-on-substrate (TPoS)Key words
Anisotropic/contour mode/doping/gyroscope/microelectromechanical systems (MEMS) resonator/piezoelectric/temperature coefficient of frequency (TCF)/temperature compensation/thin-film piezoelectric-on-substrate (TPoS)引用本文复制引用
Thi Dep Ha..Effects of Material and Dimension on TCF, Frequency, and Q of Radial Contour Mode AlN-on-Si MEMS Resonators[J].电子科技学刊,2021,19(4):319-334,16.
