Fabrication of High-Density Out-of-Plane Microneedle Arrays with Various Heights and Diverse Cross-Sectional Shapes
Fabrication of High-Density Out-of-Plane Microneedle Arrays with Various Heights and Diverse Cross-Sectional Shapes
摘要
关键词
Microneedle/Various heights/Cross-sectional shapes/Isotropic etch/Deep reactive ion etchingKey words
Microneedle/Various heights/Cross-sectional shapes/Isotropic etch/Deep reactive ion etching引用本文复制引用
Hyeonhee Roh,Young Jun Yoon,Jin Soo Park,Dong-Hyun Kang,Seung Min Kwak,Byung Chul Lee,Maesoon Im..Fabrication of High-Density Out-of-Plane Microneedle Arrays with Various Heights and Diverse Cross-Sectional Shapes[J].纳微快报（英文）,2022,14(2):60-78,19.基金项目
Authors thank all staff members of KIST Micro/Nano Fabrication Center for technical supports.This work was supported by KIST (Korea Institute of Science and Technol-ogy) institutional grants (2E30965,and 2V07360),the National R&D Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Science and ICT (Nos.2020R1C1C1006065,2021M3F3A2A01037366).This work was also supported by the Korea Medical Device Development Fund grant funded by the Korea government (the Ministry of Science and ICT,the Ministry of Trade,Industry and Energy,the Ministry of Health & Welfare,the Ministry of Food and Drug Safety) (Project Number:9991006818,KMDF_ PR_ 20200901_0145-2021).Open access funding provided by Shanghai Jiao Tong University. （Korea Institute of Science and Technol-ogy）
