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Nano-precision metrology of X-ray mirrors with laser speckle angular measurement

Hongchang Wang Simone Moriconi Kawal Sawhney

光:科学与应用(英文版)2021,Vol.10Issue(10):1915-1927,13.
光:科学与应用(英文版)2021,Vol.10Issue(10):1915-1927,13.

Nano-precision metrology of X-ray mirrors with laser speckle angular measurement

Nano-precision metrology of X-ray mirrors with laser speckle angular measurement

Hongchang Wang 1Simone Moriconi 1Kawal Sawhney2

作者信息

  • 1. Diamond Light Source Ltd, Harwell Science and Innovation Campus, DidcotOX110DE, UK
  • 2. Department of Engineering Science, University of Oxford, Parks Road, OxfordOX13PJ, UK
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摘要

引用本文复制引用

Hongchang Wang,Simone Moriconi,Kawal Sawhney..Nano-precision metrology of X-ray mirrors with laser speckle angular measurement[J].光:科学与应用(英文版),2021,10(10):1915-1927,13.

基金项目

This work was carried out with the support of Diamond Light Source Ltd,UK.The authors would particularly like to thank Simon Alcock and Ioana Nistea for providing access to the NOM gantry to carry out measurements with SAM,and for inspiring discussions during the experiments.The authors would like to thank Murilo Bazan Da Silva for providing the HDX measurement data for comparison.The authors are very grateful to John Sutter for meticulously reading and correcting the manuscript and to Tunhe Zhou and Hiten Patel for helpful discussion and technical assistance.Simone Moriconi would like to thank Diamond Light Source and the University of Oxford for funding his PhD programme. ()

光:科学与应用(英文版)

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2095-5545

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