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Frequency dependence on polarization switching measurement in ferroelectric capacitors

Zhaomeng Gao Shuxian Lyu Hangbing Lyu

半导体学报（英文版）2022，Vol.43Issue(1)：99-103,5.

半导体学报（英文版）2022，Vol.43Issue(1)：99-103,5.DOI:10.1088/1674-4926/43/1/014102

Frequency dependence on polarization switching measurement in ferroelectric capacitors

Zhaomeng Gao ¹Shuxian Lyu ²Hangbing Lyu¹

作者信息

1. Key Laboratory of Microelectronics Device & Integrated Technology,Institute of Microelectronics of Chinese Academy of Sciences,Beijing 100029,China
2. University of Chinese Academy of Sciences,Beijing 100049,China
折叠

摘要

关键词

PUND measurement/HfO2-based ferroelectric/RC delay

Key words

PUND measurement/HfO2-based ferroelectric/RC delay

引用本文复制引用

Zhaomeng Gao,Shuxian Lyu,Hangbing Lyu..Frequency dependence on polarization switching measurement in ferroelectric capacitors[J].半导体学报（英文版）,2022,43(1):99-103,5.

基金项目

This work was supported by the Ministry of Science and Technology (MOST) of China under Grant 2016YFA0203800,and in part by the National Natural Science Foundation of China under Grants 61834009,62025406,92064003,61821091 and the Strategic Priority Research Program of the Chinese Academy of Sciences under Grant XDB44010300. （MOST）

半导体学报（英文版）

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ISSN：1674-4926

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