传感技术学报2021，Vol.34Issue(12)：1591-1596,6.DOI:10.3969/j.issn.1004-1699.2021.12.005
MEMS安全起爆芯片技术研究
Research on Safe Detonation Chip Technology Based on MEMS Technology
薛艳 1任小明 1解瑞珍 1刘卫 1刘兰 1平川1
作者信息
- 1. 陕西应用物理化学研究所,陕西 西安710061
- 折叠
摘要
Abstract
Aiming at the safety problem of MEMS low-energy pyrotechnics,this paper designs a MEMS safety deto-nation chip based on the MEMS switch,including Ni-Cr micro heater layer,insulation layer and circuit layer. Physi-cal characterization,simulation analysis and safety ignition performance test were carried out. The experimental re-sults display that the MEMS switch realizes on-off conversion successfully. Accordingly,the safety ignition chip im-proves the ignition safety while firing reliably at low energy,and the full ignition current is 0.8 A,the full ignition voltage is 7 V,the action time is 22 μs. It provides effective support for the safety technology of MEMS low-energy pyrotechnics.关键词
MEMS技术/安全起爆芯片/MEMS开关/Ni-Cr加热器/性能测试Key words
MEMS technology/safety detonation chip/MEMS switch/Ni-Cr heater/performance test分类
信息技术与安全科学引用本文复制引用
薛艳,任小明,解瑞珍,刘卫,刘兰,平川..MEMS安全起爆芯片技术研究[J].传感技术学报,2021,34(12):1591-1596,6.
