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Deep learning in optical metrology:a review

Chao Zuo Jiaming Qian Shijie Feng Wei Yin Yixuan Li Pengfei Fan Jing Han Kemao Qian Qian Chen

光：科学与应用（英文版）2022，Vol.11Issue(4)：466-519,54.

Deep learning in optical metrology:a review

Chao Zuo ¹Jiaming Qian ²Shijie Feng ¹Wei Yin ²Yixuan Li ¹Pengfei Fan ²Jing Han ¹Kemao Qian ²Qian Chen¹

作者信息

1. Smart Computational Imaging(SCI)Laboratory,Nanjing University of Science and Technology,210094 Nanjing,Jiangsu Province,China
2. Jiangsu Key Laboratory of Spectral Imaging&Intelligent Sense,Nanjing University of Science and Technology,210094 Nanjing,Jiangsu Province,China
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摘要

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Chao Zuo,Jiaming Qian,Shijie Feng,Wei Yin,Yixuan Li,Pengfei Fan,Jing Han,Kemao Qian,Qian Chen..Deep learning in optical metrology:a review[J].光：科学与应用（英文版）,2022,11(4):466-519,54.

基金项目

This work was supported by National Natural Science Foundation of China(U21B2033,62075096,62005121),Leading Technology of Jiangsu Basic Research Plan(BK20192003),"333 Engineering"Research Project of Jiangsu Province(BRA2016407),Jiangsu Provincial"One belt and one road"innovation cooperation project(BZ2020007),Fundamental Research Funds for the Central Universities(30921011208,30919011222,30920032101),and Open Research Fund of Jiangsu Key Laboratory of Spectral Imaging&Intelligent Sense(JSGP202105). （U21B2033,62075096,62005121）

光：科学与应用（英文版）

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ISSN：2095-5545

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