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Sub-nanometer ultrathin epitaxy of AlGaN and its application in efficient doping

Jiaming Wang Xinqiang Wang Weikun Ge Bo Shen Mingxing Wang Fujun Xu Baiyin Liu Jing Lang Na Zhang Xiangning Kang Zhixin Qin Xuelin Yang

光：科学与应用（英文版）2022，Vol.11Issue(4)：654-661,8.

Sub-nanometer ultrathin epitaxy of AlGaN and its application in efficient doping

Jiaming Wang ¹Xinqiang Wang ¹Weikun Ge ²Bo Shen ³Mingxing Wang ¹Fujun Xu ¹Baiyin Liu ²Jing Lang ³Na Zhang ¹Xiangning Kang ¹Zhixin Qin ¹Xuelin Yang¹

作者信息

1. State Key Laboratory of Artificial Microstructure and Mesoscopic Physics,School of Physics,Peking University,100871 Beijing,China
2. Nano-optoelectronics Frontier Center of Ministry of Education,Peking University,100871 Beijing,China
3. Collaborative Innovation Center of Quantum Matter,100871 Beijing,China
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摘要

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Jiaming Wang,Xinqiang Wang,Weikun Ge,Bo Shen,Mingxing Wang,Fujun Xu,Baiyin Liu,Jing Lang,Na Zhang,Xiangning Kang,Zhixin Qin,Xuelin Yang..Sub-nanometer ultrathin epitaxy of AlGaN and its application in efficient doping[J].光：科学与应用（英文版）,2022,11(4):654-661,8.

基金项目

This work was supported by the National Key Research and Development Program of China(Nos.2016YFB0400101,and 2018YFE0125700),the National Natural Science Foundation of China(Nos.61974002,62075081,and 61927806),the Key-Area Research and Development Program of Guangdong Province(No.2020B010172001),and the Major Scientific and Technological Innovation Project(MSTIP)of Shandong Province(No.2019JZZY010209). （Nos.2016YFB0400101,and 2018YFE0125700）

光：科学与应用（英文版）

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ISSN：2095-5545

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