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基于铌酸锂薄膜的Y波导集成调制器设计

郭宏杰 刘海锋 王振诺 谭满清 李智勇 雷明 郭文涛

红外与毫米波学报2022,Vol.41Issue(3):626-630,5.
红外与毫米波学报2022,Vol.41Issue(3):626-630,5.DOI:10.11972/j.issn.1001-9014.2022.03.014

基于铌酸锂薄膜的Y波导集成调制器设计

Design of a novel Y-junction electro-optic modulator based on thin film lithium niobite

郭宏杰 1刘海锋 2王振诺 1谭满清 3李智勇 2雷明 1郭文涛2

作者信息

  • 1. 中国科学院半导体研究所集成光电子国家重点实验室,北京100083
  • 2. 中国科学院大学材料科学与光电工程中心,北京100049
  • 3. 中国科学院半导体研究所光电子器件国家工程研究中心,北京100083
  • 折叠

摘要

Abstract

In recent years,the high-performance electro-optic modulator based on the thin-film lithium niobate (TFLN)platform has been receiving considerable attention due to the featuring small footprint and low energy loss. In this paper,a novel Y-junction electro-optic modulator with a vertical electrode structure was designed based on TFLN. The relationship between the low half-wave voltage and the buffer layer thickness for the novel modulator was investigated. Meanwhile,the design parameters of Y-junction were optimized,and found that the half-wave voltage is less than 1. 5 V and the insertion loss is less than 5 dB. Finally,the Y-junction electro-optic modulator was fabricated. This study not only provides insights on the design and realization of compact footprint photonic waveguides in the TFLN platform but also,experimental evidence for the fabrication of electro-optic modulators with high-performance and multifunction.

关键词

电光调制器/TFLN/Y波导

Key words

electro-optic modulator/TFLN/Y-junction waveguide

分类

信息技术与安全科学

引用本文复制引用

郭宏杰,刘海锋,王振诺,谭满清,李智勇,雷明,郭文涛..基于铌酸锂薄膜的Y波导集成调制器设计[J].红外与毫米波学报,2022,41(3):626-630,5.

基金项目

Supported by Science and Technology Project of State Grid Corporation of China(No.5700-202058482A-0-0-00),National Key Re-search and Development Program of China(No.2019YFB2203802) (No.5700-202058482A-0-0-00)

红外与毫米波学报

OA北大核心CSCDCSTPCDSCI

1001-9014

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