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Review in situ transmission electron microscope with machine learning

Zhiheng Cheng Chaolun Wang Xing Wu Junhao Chu

半导体学报（英文版）2022，Vol.43Issue(8)：11-24,14.

半导体学报（英文版）2022，Vol.43Issue(8)：11-24,14.DOI:10.1088/1674-4926/43/8/081001

Review in situ transmission electron microscope with machine learning

Zhiheng Cheng ¹Chaolun Wang ¹Xing Wu ¹Junhao Chu¹

作者信息

1. In Situ Devices Center,Shanghai Key Laboratory of Multidimensional Information Processing,East China Normal University,Shanghai 200241,China
折叠

摘要

关键词

electron microscopy/machine learning/in situ/image analysis/semiconductor

Key words

electron microscopy/machine learning/in situ/image analysis/semiconductor

引用本文复制引用

Zhiheng Cheng,Chaolun Wang,Xing Wu,Junhao Chu..Review in situ transmission electron microscope with machine learning[J].半导体学报（英文版）,2022,43(8):11-24,14.

基金项目

This work is supported by NSFC under Grant Nos.62074057,62174056,Projects of Science and Technology Com-mission of Shanghai Municipality Grant Nos.(19ZR1473800,18DZ2270800).'Shuguang Program'supported by Shanghai Education Development Foundation and Shanghai Municipal Education Commission,and the Fundamental Research Funds for the Central Universities. （19ZR1473800,18DZ2270800）

半导体学报（英文版）

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ISSN：1674-4926

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