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Technologies and applications of silicon-based micro-optical electromechanical systems:A brief review

Shanshan Chen Yongyue Zhang Xiaorong Hong Jiafang Li

半导体学报（英文版）2022，Vol.43Issue(8)：25-33,9.

半导体学报（英文版）2022，Vol.43Issue(8)：25-33,9.DOI:10.1088/1674-4926/43/8/081301

Technologies and applications of silicon-based micro-optical electromechanical systems:A brief review

Shanshan Chen ¹Yongyue Zhang ¹Xiaorong Hong ²Jiafang Li²

作者信息

1. Key Laboratory for Microstructural Material Physics of Hebei Province,School of Science,Yanshan University,Qinhuangdao 066004,China
2. Key Laboratory of Advanced Optoelectronic Quantum Architecture and Measurement(Ministry of Education),Beijing Key Laboratory of Nanophotonics&Ultrafine Optoelectronic Systems,and School of Physics,Beijing Institute of Technology,Beijing 100081,China
折叠

摘要

关键词

MOEMS/Si-based micromachining technology/micromirror/micro-spectrometer/optical switches

Key words

MOEMS/Si-based micromachining technology/micromirror/micro-spectrometer/optical switches

引用本文复制引用

Shanshan Chen,Yongyue Zhang,Xiaorong Hong,Jiafang Li..Technologies and applications of silicon-based micro-optical electromechanical systems:A brief review[J].半导体学报（英文版）,2022,43(8):25-33,9.

基金项目

This work is supported by the National Natural Science Foundation of China under Grant No.61975016,the Science and Technology Project of Guangdong(2020B010190001),Natural Science Foundation of Beijing Municipality(1212013 and Z190006),Beijing Municipal Science&Technology Com-mission,Administrative Commission of Zhongguancun Sci-ence Park No.Z211100004821009,and Cultivation Project for Basic Research and Innovation of Yanshan University No.2021LGQN021.The authors thank Analysis&Testing Center at Beijing Institute of Technology for assistance. （2020B010190001）

半导体学报（英文版）

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ISSN：1674-4926

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