Electrical and optical properties of hydrogen plasma treatedβ-Ga_(2)O_(3) thin filmsOACSCDCSTPCDEI
The behavior of H inβ-Ga_(2)O_(3) is of substantial interest because it is a common residual impurity that is present inβ-Ga_(2)O_(3),regardless of the synthesis methods.Herein,we report the influences of H-plasma exposure on…查看全部>>
Qian Jiang;Junhua Meng;Yiming Shi;Zhigang Yin;Jingren Chen;Jing Zhang;Jinliang Wu;Xingwang Zhang
Key Lab of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China School of Information Science and Technology,North China University of Technology,Beijing 100144,ChinaFaculty of Science,Beijing University of Technology,Beijing 100124,ChinaKey Lab of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China Faculty of Science,Beijing University of Technology,Beijing 100124,ChinaKey Lab of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,ChinaKey Lab of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,ChinaSchool of Information Science and Technology,North China University of Technology,Beijing 100144,ChinaKey Lab of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,ChinaKey Lab of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China
物理学
β-Ga_(2)O_(3)filmhydrogen plasma treatmentelectrical propertiesscattering mechanismsdefect
《半导体学报:英文版》 2022 (9)
P.74-80,7
supported by the National Natural Science Foundation of China (Grant Nos. 62174009, 61904174 and 61874106)the Natural Science Foundation of Beijing Municipality (Grant No. 4212045)the Strategic Priority Research Program of Chinese Academy of Sciences (Grant No. XDB43000000)
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