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Growth and characterization ofβ-Ga_(2)O_(3)thin films grown on off-angled Al_(2)O_(3)substrates by metal-organic chemical vapor deposition

Yabao Zhang Jun Zheng Peipei Ma Xueyi Zheng Zhi Liu Yuhua Zuo Chuanbo Li Buwen Cheng

半导体学报:英文版2022，Vol.43Issue(9)：P.68-73,6.

半导体学报:英文版2022，Vol.43Issue(9)：P.68-73,6.DOI:10.1088/1674-4926/43/9/092801

Growth and characterization ofβ-Ga_(2)O_(3)thin films grown on off-angled Al_(2)O_(3)substrates by metal-organic chemical vapor deposition

Yabao Zhang ¹Jun Zheng ¹Peipei Ma ¹Xueyi Zheng ²Zhi Liu ¹Yuhua Zuo ¹Chuanbo Li ³Buwen Cheng¹

作者信息

1. State Key Laboratory on Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China
2. State Key Laboratory on Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China School of Science,Minzu University of China,Beijing 100081,China
3. School of Science,Minzu University of China,Beijing 100081,China
折叠

摘要

关键词

β-Ga_(2)O_(3)/heteroepitaxy/mis-cut Al_(2)O_(3)substrates/MOCVD

分类

通用工业技术

引用本文复制引用

Yabao Zhang,Jun Zheng,Peipei Ma,Xueyi Zheng,Zhi Liu,Yuhua Zuo,Chuanbo Li,Buwen Cheng..Growth and characterization ofβ-Ga_(2)O_(3)thin films grown on off-angled Al_(2)O_(3)substrates by metal-organic chemical vapor deposition[J].半导体学报:英文版,2022,43(9):P.68-73,6.

基金项目

the National Key Research and Development Program of China(Grant No.2018YFB2200500) （Grant No.2018YFB2200500）

the National Natural Science Foundation(Grant Nos.62050073,62090054,61975196). （Grant Nos.62050073,62090054,61975196）

半导体学报:英文版

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ISSN：1674-4926

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