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Simple Ultrasonic-Assisted Clean Graphene Transfer

Zhuo-Cheng Zhang Xiao-Qiu-Yan Zhang Min Hu

电子科技学刊2022,Vol.20Issue(3):237-245,9.
电子科技学刊2022,Vol.20Issue(3):237-245,9.DOI:10.1016/j.jnlest.2022.100168

Simple Ultrasonic-Assisted Clean Graphene Transfer

Simple Ultrasonic-Assisted Clean Graphene Transfer

Zhuo-Cheng Zhang 1Xiao-Qiu-Yan Zhang 2Min Hu1

作者信息

  • 1. Terahertz Research Center, School of Electronic Science and Engineering,University of Electronic Science and Technology of China, Chengdu 610054
  • 2. Key Laboratory of Terahertz Technology (Ministry of Education), University of Electronic Science and Technology of China, Chengdu 610054
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摘要

关键词

Chemical vapor deposition (CVD)/clean graphene transfer/ultrasonic processing

Key words

Chemical vapor deposition (CVD)/clean graphene transfer/ultrasonic processing

引用本文复制引用

Zhuo-Cheng Zhang,Xiao-Qiu-Yan Zhang,Min Hu..Simple Ultrasonic-Assisted Clean Graphene Transfer[J].电子科技学刊,2022,20(3):237-245,9.

基金项目

This work was supported by the National Key Research and Development Program of China under Grants No.2017YFA0701000 and No.2020YFA0714001 ()

the National Natural Science Foundation of China under Grants No.61988102,No.61921002,and No.62071108 ()

the Fundamental Research Funds for the Central Universities under Grants No.ZYGX2020J003 and No.ZYGX2020ZB007. ()

电子科技学刊

OACSCD

1674-862X

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