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Identification of subsurface damage of 4H-SiC wafers by combining photo-chemical etching and molten-alkali etching

Wenhao Geng Guang Yang Xuqing Zhang Xi Zhang Yazhe Wang Lihui Song Penglei Chen Yiqiang Zhang Xiaodong Pi Deren Yang Rong Wang

半导体学报:英文版2022，Vol.43Issue(10)：P.73-78,6.

半导体学报:英文版2022，Vol.43Issue(10)：P.73-78,6.DOI:10.1088/1674-4926/43/10/102801

Identification of subsurface damage of 4H-SiC wafers by combining photo-chemical etching and molten-alkali etching

Wenhao Geng ¹Guang Yang ²Xuqing Zhang ¹Xi Zhang ³Yazhe Wang ³Lihui Song ³Penglei Chen ³Yiqiang Zhang ⁴Xiaodong Pi ¹Deren Yang ¹Rong Wang¹

作者信息

1. State Key Laboratory of Silicon Materials&School of Materials Science and Engineering,Zhejiang University,Hangzhou 310027,China Institute of Advanced Semiconductors&Zhejiang Provincial Key Laboratory of Power Semiconductor Materials and Devices,Hangzhou Innovation Center,Zhejiang University,Hangzhou 311200,China
2. Key Laboratory of Optical Field Manipulation of Zhejiang Province,Department of Physics,Zhejiang Sci-Tech University,Hangzhou 310018,China
3. Institute of Advanced Semiconductors&Zhejiang Provincial Key Laboratory of Power Semiconductor Materials and Devices,Hangzhou Innovation Center,Zhejiang University,Hangzhou 311200,China
4. School of Materials Science and Engineering&College of Chemistry,Zhengzhou University,Zhengzhou 450001,China
折叠

摘要

关键词

4H-SiC/subsurface damages/photo-chemical etching/molten-alkali etching

分类

化学化工

引用本文复制引用

Wenhao Geng,Guang Yang,Xuqing Zhang,Xi Zhang,Yazhe Wang,Lihui Song,Penglei Chen,Yiqiang Zhang,Xiaodong Pi,Deren Yang,Rong Wang..Identification of subsurface damage of 4H-SiC wafers by combining photo-chemical etching and molten-alkali etching[J].半导体学报:英文版,2022,43(10):P.73-78,6.

基金项目

supported by “Pioneer” and “Leading Goose”R&D Program of Zhejiang (Grant No. 2022C01021) （Grant No. 2022C01021）

National Key Research and Development Program of China (Grant No.2018YFB2200101) （Grant No.2018YFB2200101）

National Natural Science Foundation of China (Grant Nos. 91964107, 61774133) （Grant Nos. 91964107, 61774133）

Fundamental Research Funds for the Central Universities (Grant No.2018XZZX003-02) （Grant No.2018XZZX003-02）

Natural Science Foundation of China for Innovative Research Groups (Grant No. 61721005) （Grant No. 61721005）

Zhejiang University Education Foundation Global Partnership Fund （）

半导体学报:英文版

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ISSN：1674-4926

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