半导体学报:英文版2022，Vol.43Issue(10)：P.50-55,6.DOI:10.1088/1674-4926/43/10/102002
Synthesis and electromagnetic transport of large-area 2D WTe_(2) thin film
Yumeng Zhang 1Zhejia Wang 2Jiaheng Feng 2Shuaiqiang Ming 3Furong Qu 1Yang Xia 1Meng He 4Zhimin Hu 1Jing Wang5
作者信息
- 1. Institute of Microelectronics of the Chinese Academy of Sciences,Beijing100029,China University of Chinese Academy of Sciences,Beijing100049,China
- 2. Jiaxing Microelectronics Instrument and Equipment Engineering Center of the Chinese Academy of Sciences,Jiaxing 314000,China Jiaxing Kemin Electronic Equipment Technology Co.,Ltd.,Jiaxing 314000,China
- 3. Institute of Microelectronics of the Chinese Academy of Sciences,Beijing100029,China Jiaxing Microelectronics Instrument and Equipment Engineering Center of the Chinese Academy of Sciences,Jiaxing 314000,China
- 4. Institute of Microelectronics of the Chinese Academy of Sciences,Beijing100029,China
- 5. Institute of Physics of the Chinese Academy of Sciences,Beijing100190,China
- 折叠
摘要
关键词
atomic layer deposition(ALD)/chemical vapor deposition(CVD)/telluride temperature/WTe_(2)thin film分类
通用工业技术引用本文复制引用
Yumeng Zhang,Zhejia Wang,Jiaheng Feng,Shuaiqiang Ming,Furong Qu,Yang Xia,Meng He,Zhimin Hu,Jing Wang..Synthesis and electromagnetic transport of large-area 2D WTe_(2) thin film[J].半导体学报:英文版,2022,43(10):P.50-55,6.基金项目
supported by the National Key Research and Development Program of China(No.2018YFA0704804) （No.2018YFA0704804）
Chinese Academy of Sciences Research Instruments and Equipment Development Project(No.ZDKYYQ20220001)。 （No.ZDKYYQ20220001）
