红外与毫米波学报2022，Vol.41Issue(5)：888-893,6.DOI:10.11972/j.issn.1001-9014.2022.05.013
薄膜光学常数的原位测定
On-site determination of optical constants for thin films
摘要
Abstract
The optical constants(refractive index and extinction coefficient)accuracy of thin films directly affects the properties of designed and fabricated optical devices. Most of the determination methods of optical constants are complex and cannot be applied during the film depositing process. In this paper,an optical constants determi? nation method of thin films on-site is proposed. By monitoring the transmittance of depositing materials,this method can rapidly and accurately determine the optical constants on-site. For demonstration,the near-infrared optical constants of high-absorption material Si,low-absorption material Ta2O5 and ultra-low-absorption material SiO2 are obtained as n=3. 22,k=4. 6×10-3,n=2. 06,k=1. 3×10-3 and n= 1. 46,k=6. 6×10-5 respectively by this method. It reveals that this method is suitable for determining both strong and weak absorption materials' optical constants. It provides an effective way for precisely determining optical constants on-site,which is meaningful for the design and fabrication of high-quality optical devices.关键词
光学常数/近红外/薄膜/原位/测定Key words
optical constants/near-infrared/thin film/on-site/determination引用本文复制引用
谢茂彬,吴智勇,崔恒毅,赵新潮,玄志一,刘清权,刘锋,孙聊新,王少伟..薄膜光学常数的原位测定[J].红外与毫米波学报,2022,41(5):888-893,6.基金项目
This work was fumded by Natuonal key R&D Program of China(2021YFA07115500)and National Notural Science Foundation of China(11874376). （2021YFA07115500）
