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Bulk GaN-based SAW resonators with high quality factors for wireless temperature sensor

Hongrui Lv Xianglong Shi Yujie Ai Zhe Liu Defeng Lin Lifang Jia Zhe Cheng Jie Yang Yun Zhang

半导体学报:英文版2022，Vol.43Issue(11)：P.78-83,6.

半导体学报:英文版2022，Vol.43Issue(11)：P.78-83,6.DOI:10.1088/1674-4926/43/11/114101

Bulk GaN-based SAW resonators with high quality factors for wireless temperature sensor

Hongrui Lv ¹Xianglong Shi ²Yujie Ai ¹Zhe Liu ³Defeng Lin ⁴Lifang Jia ³Zhe Cheng ³Jie Yang ³Yun Zhang¹

作者信息

1. Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China
2. Beijing Aerospace Micro-electronics Technology Co.,Beijing 100854,China
3. Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China
4. Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China Lishui Zhongke Semiconductor Material Co.,Ltd.,Lishui 323000,China
折叠

摘要

关键词

surface acoustic wave/resonator/gallium nitride/quality factor/temperature sensor

分类

信息技术与安全科学

引用本文复制引用

Hongrui Lv,Xianglong Shi,Yujie Ai,Zhe Liu,Defeng Lin,Lifang Jia,Zhe Cheng,Jie Yang,Yun Zhang..Bulk GaN-based SAW resonators with high quality factors for wireless temperature sensor[J].半导体学报:英文版,2022,43(11):P.78-83,6.

基金项目

The research is supported by the National Natural Sciences Foundation of China(Grant No.61974137) （Grant No.61974137）

the One Hundred Person project of the Chinese Academy of Science. （）

半导体学报:英文版

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ISSN：1674-4926

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