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Research progress of large size SiC single crystal materials and devices

Xiufang Chen Xianglong Yang Xuejian Xie Yan Peng Longfei Xiao Chen Shao Huadong Li Xiaobo Hu Xiangang Xu

光：科学与应用（英文版）2023，Vol.12Issue(1)：60-67,8.

Research progress of large size SiC single crystal materials and devices

Xiufang Chen ¹Xianglong Yang ¹Xuejian Xie ¹Yan Peng ¹Longfei Xiao ¹Chen Shao ¹Huadong Li ¹Xiaobo Hu ¹Xiangang Xu¹

作者信息

1. State Key Laboratory of Crystal Materials,Institute of novel semiconductors,Shandong University,Jinan 250100,China
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摘要

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Xiufang Chen,Xianglong Yang,Xuejian Xie,Yan Peng,Longfei Xiao,Chen Shao,Huadong Li,Xiaobo Hu,Xiangang Xu..Research progress of large size SiC single crystal materials and devices[J].光：科学与应用（英文版）,2023,12(1):60-67,8.

基金项目

This work was supported by the National Natural Science Foundation of China under grant No.52022052 and No.51902182,the Shandong Province Natural Science Foundation of China under grant No.ZR2019JQ01,ZR2019BEM030 and ZR2019BEM011,Key R&D project of Shandong Province under grant No.2019JMRH0901and 2019JMRH0201. （）

光：科学与应用（英文版）

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ISSN：2095-5545

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