无机材料学报2023，Vol.38Issue(2)：219-224,6.DOI:10.15541/jim20220300
193 nm激光下不同含量Y杂质CaF2晶体辐照损伤研究
Irradiation Damage of CaF2 with Different Yttrium Concentrations under 193 nm Laser
摘要
Abstract
Radiation resistance of CaF2 crystal is one of the critical properties in the application of deep ultraviolet lithography, but the damage process under 193 nm laser irradiation is still unclear. This paper reports the damage behavior of CaF2 crystals under 193 nm laser irradiation and the key defect factors affecting the damage. Through the 193 nm laser irradiation experiment, it is found that the crystal damage is mainly manifested as the radiation-induced color centers inside the crystal and the radiation-induced damage pits on the surface. Irradiation-induced color centers were analyzed by UV-visible spectrophotometer, and linear fitting was performed between absorption coefficients of different color centers and Y impurity contents. The results show that Y ion has a low-order orbit that overlaps with the F center structure wave function, and hybridizes to form a stable structure. There is a linear relationship between Y ions contents and intrinsic color centers of CaF2 crystals, confirming that Y element is the key impurity ion affecting the formation of color centers. Energy dispersive X-ray spectrometer (EDS) results show that the content of calcium in the damage pits increases and the content of fluorine decreases, which confirms that the diffusion of H centers and the aggregation of F centers lead to irradiation damage. Electron backscatter diffraction (EBSD) results show that surface irradiation damage occurs preferentially at dislocations. Therefore, reducing the impurity content and dislocation density is an important way to improve the anti-irradiation damage performance of calcium fluoride crystals under 193 nm laser.关键词
氟化钙晶体/色心/激光辐照损伤/杂质含量/位错密度Key words
CaF2 crystal/color center/laser irradiation damage/impurity content/dislocation density分类
化学化工引用本文复制引用
王华进,杨秋红,苏良碧,寇华敏,王墉哲,姜大朋,张博,钱小波,王静雅,朱琳玲,曾爱军..193 nm激光下不同含量Y杂质CaF2晶体辐照损伤研究[J].无机材料学报,2023,38(2):219-224,6.基金项目
Strategic Priority Program of the Chinese Academy of Sciences(XDA25020313) （XDA25020313）
National Natural Science Foundation of China(61925508) （61925508）
Science and Technology Commission of Shanghai Municipality(20501110300,20511107400) （20501110300,20511107400）
CAS Project for Young Scientists in Basic Research(YSBR-024) （YSBR-024）
