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Microcantilever sensors for biochemical detection

Jingjing Wang Baozheng Xu Yinfang Zhu Junyuan Zhao

半导体学报（英文版）2023，Vol.44Issue(2)：71-81,11.

半导体学报（英文版）2023，Vol.44Issue(2)：71-81,11.DOI:10.1088/1674-4926/44/2/023105

Microcantilever sensors for biochemical detection

Jingjing Wang ¹Baozheng Xu ¹Yinfang Zhu ²Junyuan Zhao²

作者信息

1. School of Electronic and Information Engineering,Tiangong University,Tianjin 300380,China
2. Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China
折叠

摘要

关键词

microcantilever/sensor/biochemical detection/MEMS

Key words

microcantilever/sensor/biochemical detection/MEMS

引用本文复制引用

Jingjing Wang,Baozheng Xu,Yinfang Zhu,Junyuan Zhao..Microcantilever sensors for biochemical detection[J].半导体学报（英文版）,2023,44(2):71-81,11.

基金项目

This research was supported by National Science Founda-tion of China(61804107,61804150),National Key Research and Development Program of China(2022YFF0706102),and Tianjin Municipal Science and Technology Bureau(20JCQN-JC00180). （61804107,61804150）

半导体学报（英文版）

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ISSN：1674-4926

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