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Homojunction structure amorphous oxide thin film transistors with ultra-high mobility

Rongkai Lu Fei Zhuge Zhizhen Ye Siqin Li Jianguo Lu Bojing Lu Ruqi Yang Yangdan Lu Wenyi Shao Yi Zhao Liping Zhu

半导体学报（英文版）2023，Vol.44Issue(5)：24-32,9.
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半导体学报（英文版）2023，Vol.44Issue(5)：24-32,9.DOI:10.1088/1674-4926/44/5/052101

Homojunction structure amorphous oxide thin film transistors with ultra-high mobility

Homojunction structure amorphous oxide thin film transistors with ultra-high mobility

Rongkai Lu 1Fei Zhuge 2Zhizhen Ye 3Siqin Li 1Jianguo Lu 3Bojing Lu 1Ruqi Yang 1Yangdan Lu 1Wenyi Shao 1Yi Zhao 4Liping Zhu3

作者信息

  • 1. State Key Laboratory of Silicon Materials,Key Laboratory for Biomedical Engineering of Ministry of Education,School of Materials Science and Engineering,Zhejiang University,Hangzhou 310027,China
  • 2. Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Sciences,Ningbo 315201,China
  • 3. State Key Laboratory of Silicon Materials,Key Laboratory for Biomedical Engineering of Ministry of Education,School of Materials Science and Engineering,Zhejiang University,Hangzhou 310027,China||Wenzhou Key Laboratory of Novel Optoelectronic and Nano Materials,Institute of Wenzhou,Zhejiang University,Wenzhou 325006,China
  • 4. Department of Electronic Science and Technology,College of Information Science and Electronic Engineering,Zhejiang University,Hangzhou 310027,China
  • 折叠

摘要

关键词

thin film transistors/homojunction/carrier mobility/amorphous oxides

Key words

thin film transistors/homojunction/carrier mobility/amorphous oxides

引用本文复制引用

Rongkai Lu,Fei Zhuge,Zhizhen Ye,Siqin Li,Jianguo Lu,Bojing Lu,Ruqi Yang,Yangdan Lu,Wenyi Shao,Yi Zhao,Liping Zhu..Homojunction structure amorphous oxide thin film transistors with ultra-high mobility[J].半导体学报（英文版）,2023,44(5):24-32,9.

基金项目

This work was supported by National Natural Science Foundation of China(No.U20A20209),Zhejiang Provincial Natural Science Foundation of China(LD19E020001),Zhe-jiang Provincial Key Research and Development Program(2021C01030),and"Pioneer"and"Leading Goose"R&D Pro-gram of Zhejiang Province(2021C01SA301612). （No.U20A20209）

半导体学报（英文版）

OACSCDCSTPCDEI

1674-4926

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