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Monolithic integration of embedded Ⅲ-Ⅴ lasers on SOI

Wen-Qi Wei Jian-Jun Zhang Ting Wang An He Bo Yang Zi-Hao Wang Jing-Zhi Huang Dong Han Ming Ming Xuhan Guo Yikai Su

光：科学与应用（英文版）2023，Vol.12Issue(5)：743-753,11.

Monolithic integration of embedded Ⅲ-Ⅴ lasers on SOI

Wen-Qi Wei ¹Jian-Jun Zhang ²Ting Wang ²An He ³Bo Yang ⁴Zi-Hao Wang ²Jing-Zhi Huang ⁴Dong Han ⁵Ming Ming ⁵Xuhan Guo ³Yikai Su³

作者信息

1. Institute of Physics,Chinese Academy of Sciences,Beijing,China||Songshan Lake Materials Laboratory,Dongguan,Guangdong,China
2. Institute of Physics,Chinese Academy of Sciences,Beijing,China||Songshan Lake Materials Laboratory,Dongguan,Guangdong,China||School of Physical Sciences,University of Chinese Academy of Sciences,Beijing,China
3. State Key Laboratory of Advanced Optical,Communication Systems and Networks,Department of Electronic Engineering,Shanghai Jiao Tong University,Shanghai,China
4. Institute of Physics,Chinese Academy of Sciences,Beijing,China||School of Physical Sciences,University of Chinese Academy of Sciences,Beijing,China
5. Institute of Physics,Chinese Academy of Sciences,Beijing,China
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摘要

引用本文复制引用

Wen-Qi Wei,Jian-Jun Zhang,Ting Wang,An He,Bo Yang,Zi-Hao Wang,Jing-Zhi Huang,Dong Han,Ming Ming,Xuhan Guo,Yikai Su..Monolithic integration of embedded Ⅲ-Ⅴ lasers on SOI[J].光：科学与应用（英文版）,2023,12(5):743-753,11.

基金项目

We gratefully acknowledge support from National Key Research and Development Program of China(2021YFB2800403),National Natural Science Foundation of China(Grant No.61975230,62225407,62005308),Innovation Program for Quantum Science and Technology(No 2021ZD0302300)Ting Wang was supported by the Youth Innovation Promotion Association of CAS(Y2022005).Mr.Mingchen Guo,Mr.Xianbiao Hu and Mr.Zhen Li are acknowledged for their early contributions in device fabrications and material growth. （2021YFB2800403）

光：科学与应用（英文版）

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ISSN：2095-5545

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