半导体学报（英文版）2023，Vol.44Issue(6)：4-6,3.DOI:10.1088/1674-4926/44/6/060301
Heterogeneous integration technology for the thermal management of Ga2O3 power devices
Heterogeneous integration technology for the thermal management of Ga2O3 power devices
Genquan Han 1Tiangui You 2Yibo Wang 3Zheng-Dong Luo 1Xin Ou 2Yue Hao1
作者信息
- 1. School of Microelectronics,Xidian University,Xi'an 710071,China
- 2. State Key Laboratory of Functional Materials for Informatics,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China
- 3. Suzhou institute of Nano-Tech and Nano-Bionics,Chinese Academy of Sciences,Suzhou 215123,China
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引用本文复制引用
Genquan Han,Tiangui You,Yibo Wang,Zheng-Dong Luo,Xin Ou,Yue Hao..Heterogeneous integration technology for the thermal management of Ga2O3 power devices[J].半导体学报（英文版）,2023,44(6):4-6,3.
