首页|期刊导航|半导体学报（英文版）|Exploring heteroepitaxial growth and electrical properties of α-Ga2O3 films on differently oriented sapphire substrates

Exploring heteroepitaxial growth and electrical properties of α-Ga2O3 films on differently oriented sapphire substrates

Wei Wang Jichun Ye Shudong Hu Zilong Wang Kaisen Liu Jinfu Zhang Simiao Wu Yuxia Yang Ning Xia Wenrui Zhang

半导体学报（英文版）2023，Vol.44Issue(6)：46-51,6.

半导体学报（英文版）2023，Vol.44Issue(6)：46-51,6.DOI:10.1088/1674-4926/44/6/062802

Exploring heteroepitaxial growth and electrical properties of α-Ga2O3 films on differently oriented sapphire substrates

Wei Wang ¹Jichun Ye ²Shudong Hu ³Zilong Wang ³Kaisen Liu ³Jinfu Zhang ³Simiao Wu ³Yuxia Yang ³Ning Xia ⁴Wenrui Zhang²

作者信息

1. Zhejiang Provincial Engineering Research Center of Energy Optoelectronic Materials and Devices,Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Sciences,Ningbo 315201,China||The Faculty of Information Science and Engineering,Ningbo University,Ningbo 315211,China
2. Zhejiang Provincial Engineering Research Center of Energy Optoelectronic Materials and Devices,Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Sciences,Ningbo 315201,China||Yongjiang Laboratory,Ningbo 315201,China
3. Zhejiang Provincial Engineering Research Center of Energy Optoelectronic Materials and Devices,Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Sciences,Ningbo 315201,China
4. Zhejiang Provincial Key Laboratory of Power Semiconductor Materials and Devices,ZJU-Hangzhou Global Scientific and Technological Innovation Center,Hangzhou 311200,China
折叠

摘要

关键词

gallium oxide/thin film epitaxy/orientation/oxygen vacancy/electrical properties

Key words

gallium oxide/thin film epitaxy/orientation/oxygen vacancy/electrical properties

引用本文复制引用

Wei Wang,Jichun Ye,Shudong Hu,Zilong Wang,Kaisen Liu,Jinfu Zhang,Simiao Wu,Yuxia Yang,Ning Xia,Wenrui Zhang..Exploring heteroepitaxial growth and electrical properties of α-Ga2O3 films on differently oriented sapphire substrates[J].半导体学报（英文版）,2023,44(6):46-51,6.

基金项目

This research was supported by the Zhejiang Provincial Natural Science Foundation under(Grant No.LZ21F040001),the Pioneer Hundred Talents Program of Chinese Academy of Sciences,the Ningbo Yongjiang Talent Introduction Pro-gramme and the Ningbo Key Scientific and Technological Project(Grant No.2022Z016). （Grant No.LZ21F040001）

半导体学报（英文版）

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ISSN：1674-4926

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