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Preparation of Sn-doped Ga2O3 thin films and their solar-blind photoelectric detection performance

Lijun Li Chengkun Li Shaoqing Wang Qin Lu Yifan Jia Haifeng Chen

半导体学报（英文版）2023，Vol.44Issue(6)：65-74,10.

半导体学报（英文版）2023，Vol.44Issue(6)：65-74,10.DOI:10.1088/1674-4926/44/6/062805

Preparation of Sn-doped Ga2O3 thin films and their solar-blind photoelectric detection performance

Lijun Li ¹Chengkun Li ¹Shaoqing Wang ¹Qin Lu ¹Yifan Jia ¹Haifeng Chen¹

作者信息

1. Key Laboratory of Advanced Semiconductor Devices and Materials,School of Electronic Engineering,Xi'an University of Posts&Telecommunications,Xi'an 710121,China
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摘要

关键词

Sn doped Ga2O3/RF magnetron sputtering/solar-blind photodetector

Key words

Sn doped Ga2O3/RF magnetron sputtering/solar-blind photodetector

引用本文复制引用

Lijun Li,Chengkun Li,Shaoqing Wang,Qin Lu,Yifan Jia,Haifeng Chen..Preparation of Sn-doped Ga2O3 thin films and their solar-blind photoelectric detection performance[J].半导体学报（英文版）,2023,44(6):65-74,10.

基金项目

This work was supported by the National Natural Sci-ence Foundation of China (Grant No. 62204203) and the Shaanxi Natural Science Basic Research Program (Grant No. 2022JQ-701). （Grant No. 62204203）

半导体学报（英文版）

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ISSN：1674-4926

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