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Micromachined Infrared Thermopile Detector Based on a Suspended Film Structure

Cheng LEI Yihao GUAN Ting LIANG Xuezhan WU Yuehang BAI Mingfeng GONG Pingang JIA Jijun XIONG

光子传感器（英文版）2023，Vol.13Issue(3)：50-62,13.

光子传感器（英文版）2023，Vol.13Issue(3)：50-62,13.DOI:10.1007/s13320-023-0682-0

Micromachined Infrared Thermopile Detector Based on a Suspended Film Structure

Cheng LEI ¹Yihao GUAN ²Ting LIANG ¹Xuezhan WU ¹Yuehang BAI ¹Mingfeng GONG ¹Pingang JIA ¹Jijun XIONG¹

作者信息

1. The State Key Laboratory of Dynamic Measurement Technology,North University of China,Taiyuan 030051,China
2. The State Key Laboratory of Dynamic Measurement Technology,North University of China,Taiyuan 030051,China||Integrated Circuit Business Group,China Resources Microelectronics Limited,Wuxi 21400,China
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摘要

关键词

Adiabatic groove/circular arrangement/double-ended symmetrical arrangement/thermopile/temperature gradient

Key words

Adiabatic groove/circular arrangement/double-ended symmetrical arrangement/thermopile/temperature gradient

引用本文复制引用

Cheng LEI,Yihao GUAN,Ting LIANG,Xuezhan WU,Yuehang BAI,Mingfeng GONG,Pingang JIA,Jijun XIONG..Micromachined Infrared Thermopile Detector Based on a Suspended Film Structure[J].光子传感器（英文版）,2023,13(3):50-62,13.

基金项目

This work was supported in part by the National Natural Science Foundation of China(Grant No.51935011),Innovative Research Group Project of National Science Foundation of China(Grant No.51821003),Fund for Shanxi"1331 Project"Key Subject Construction,Key Research and Development Project of Shanxi Province(Grant Nos.202102030201001 and 202102030201009),and Key Special Project of Science and Technology of Shanxi Province(Grant No.202201030201004). （Grant No.51935011）

光子传感器（英文版）

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ISSN：1674-9251

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