哈尔滨工业大学学报（英文版）2023，Vol.30Issue(3)：22-31,10.
Simulation Study of CMUT for Pressure Sensing Applications
Simulation Study of CMUT for Pressure Sensing Applications
Yan Zhou 1Jie Liu 1Xin Lu 1Quanfang Chen1
作者信息
- 1. Department of Electrical Engineering,Southwest Jiaotong University,Chengdu 610031,China
- 折叠
摘要
关键词
capacitive micromechanical ultrasonic transducers(CMUTs)/pressure sensor/collapsing voltage/resonance frequency/capacitance/finite element multi-physics simulationKey words
capacitive micromechanical ultrasonic transducers(CMUTs)/pressure sensor/collapsing voltage/resonance frequency/capacitance/finite element multi-physics simulation分类
信息技术与安全科学引用本文复制引用
Yan Zhou,Jie Liu,Xin Lu,Quanfang Chen..Simulation Study of CMUT for Pressure Sensing Applications[J].哈尔滨工业大学学报（英文版）,2023,30(3):22-31,10.
