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A large-area multi-finger β-Ga2O3 MOSFET and its self-heating effect

Xuanze Zhou Guangwei Xu Shibing Long

半导体学报(英文版)2023,Vol.44Issue(7):37-40,4.
半导体学报(英文版)2023,Vol.44Issue(7):37-40,4.DOI:10.1088/1674-4926/44/7/072804

A large-area multi-finger β-Ga2O3 MOSFET and its self-heating effect

A large-area multi-finger β-Ga2O3 MOSFET and its self-heating effect

Xuanze Zhou 1Guangwei Xu 1Shibing Long1

作者信息

  • 1. School of Microelectronics,University of Science and Technology of China,Hefei 230026,China
  • 折叠

摘要

关键词

β-Ga2O3/MOSFET/multi-finger/self-heating effect

Key words

β-Ga2O3/MOSFET/multi-finger/self-heating effect

引用本文复制引用

Xuanze Zhou,Guangwei Xu,Shibing Long..A large-area multi-finger β-Ga2O3 MOSFET and its self-heating effect[J].半导体学报(英文版),2023,44(7):37-40,4.

基金项目

This work was supported by the National Natural Sci-ence Foundation of China(NSFC)under Grant Nos.61925110,62004184 and 62234007,the Key-Area Research and Develop-ment Program of Guangdong Province under Grant No.2020B010174002.This work was partially carried out at the Center for Micro and Nanoscale Research and Fabrication of University of Science and Technology of China(USTC). (NSFC)

半导体学报(英文版)

OACSCDCSTPCDEI

1674-4926

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