物理学报2023，Vol.72Issue(13)：212-220,9.DOI:10.7498/aps.72.20230113
AlGaN合金的原子层沉积及其在量子点敏化太阳能电池的应用
Atomic layer deposition of AlGaN alloy and its application in quantum dot sensitized solar cells
摘要
关键词
AlGaN/等离子体增强型原子层沉积/CdSe量子点/太阳能电池Key words
AlGaN/plasma enhanced atomic layer deposition/CdSe quantum dots/solar cell引用本文复制引用
刘恒,彭铭曾,郑新和,李晔,杜梦超,仇鹏,何荧峰,宋祎萌,卫会云,朱晓丽,田丰..AlGaN合金的原子层沉积及其在量子点敏化太阳能电池的应用[J].物理学报,2023,72(13):212-220,9.基金项目
国家重点研发计划(批准号:2018YFA0703700)、国家自然科学基金青年科学基金(批准号:52002021)和中央高校基本科研业务费(批准号:FRF-IDRY-20-037)资助的课题.Project supported by the National Key Research and Development Program of China(Grant No.2018YFA0703700),the National Natural Science Foundation of China(Grant No.52002021),and the Fundamental Research Funds for the Central Universities of China(Grant No.FRF-IDRY-20-037). （批准号:2018YFA0703700）
