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Establishment and Error Analysis of Model of Interference Fringe Contrast for Laser Tracing Measurement Optical System

Hongfang Chen Mengyang Sun Yinglun Ma Liang Tang Yu Wang Huixu Song

哈尔滨工业大学学报（英文版）2023，Vol.30Issue(4)：37-49,13.

哈尔滨工业大学学报（英文版）2023，Vol.30Issue(4)：37-49,13.DOI:10.11916/j.issn.1005-9113.22014

Establishment and Error Analysis of Model of Interference Fringe Contrast for Laser Tracing Measurement Optical System

Hongfang Chen ¹Mengyang Sun ¹Yinglun Ma ¹Liang Tang ¹Yu Wang ¹Huixu Song¹

作者信息

1. Beijing Engineering Research Center of Precision Measurement Technology and Instruments,Faculty of Materials and Manufacturing,Beijing University of Technology,Beijing 100124,China
折叠

摘要

关键词

interference fringe contrast/laser tracing measurement/high precision measurement/ZEMAX

Key words

interference fringe contrast/laser tracing measurement/high precision measurement/ZEMAX

分类

机械制造

引用本文复制引用

Hongfang Chen,Mengyang Sun,Yinglun Ma,Liang Tang,Yu Wang,Huixu Song..Establishment and Error Analysis of Model of Interference Fringe Contrast for Laser Tracing Measurement Optical System[J].哈尔滨工业大学学报（英文版）,2023,30(4):37-49,13.

基金项目

Sponsored by the National Natural Science Foundation of China(Grant No.52175491). （Grant No.52175491）

哈尔滨工业大学学报（英文版）

ISSN：1005-9113

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