红外与毫米波学报2023，Vol.42Issue(4)：462-467,6.DOI:10.11972/j.issn.1001-9014.2023.04.006
一种新型环形上DBR刻蚀微结构VCSEL及其空心光束
A novel ring-shaped top-DBR etched microstructure VCSEL with a hollow beam
摘要
Abstract
The structure of a novel ring-shaped top-DBR etched microstructure VCSEL with a proton implantation high resistance region was designed.A ring column structure was formed from the upper electrode to the active re-gion,which directly generated a hollow laser beam output.The optical field distribution of the etched microstruc-ture VCSEL was calculated by FDTD software,and the obtained ring-shaped patterns maintained the hollow beam characteristics under the different mode numbers.We fabricated the etched microstructure VCSEL with a lasing wavelength of 848 nm at room temperature and investigated its performance.The threshold current was 0.27 A and the peak power was up to 170 mW.The near-field patterns of different currents clearly displayed hol-low ring-shaped spots.The distribution curves of far-field light intensity matched the characteristics of a hollow beam as well.This novel VCSEL provides a new approach for the development of hollow beams and even array devices.关键词
垂直腔面发射半导体激光器/空心激光束/刻蚀结构/质子注入Key words
vertical cavity surface emitting laser/hollow laser beam/etched microstructure/proton implantation分类
信息技术与安全科学引用本文复制引用
逄超,晏长岭,杨静航,钱冉,李奕霏..一种新型环形上DBR刻蚀微结构VCSEL及其空心光束[J].红外与毫米波学报,2023,42(4):462-467,6.基金项目
Supported by Jilin Province Science and Technology Department project(20220101122JC) （20220101122JC）
Changchun University of Science and Tech-nology project(627011102). （627011102）
