红外与毫米波学报2023，Vol.42Issue(4)：490-496,7.DOI:10.11972/j.issn.1001-9014.2023.04.010
高纯度石英玻璃40～110 GHz频段电参数的表征
Characterization of electrical parameters of high-purity quartz glass in the 40-110 GHz frequency band
朱香宝 1孙旭 1岳海昆 2钱凌轩 1倪磊3
作者信息
- 1. 电子科技大学,四川 成都 611731
- 2. 中国工程物理研究院 微系统与太赫兹研究中心,四川 成都 610200
- 3. 西南科技大学 制造过程测试技术教育部重点实验室, 四川 绵阳 621010
- 折叠
摘要
Abstract
The transmission line structures such as coplanar waveguide(CPW)and microstrip ring resonator(MRR)were designed on a high-purity quartz substrate(99.9997%)with a thickness of 127 μm.The average in-sertion loss for the CPW line varied from 0.096 to 0.176 dB/mm in the frequency range of 40-110 GHz.Further-more,the relative permittivity and loss tangent of the quartz were extracted by the MRR method.The relative per-mittivity of the quartz substrate in the V-band and W-band ranged with 3.7-3.85 and 3.85-4,respectively.The loss tangent value was approximately 0.004 in the V-band and 0.004-0.006 in the W-band.The performance comparison with other substrates shows that this high-purity quartz has excellent and stable electrical properties and its potential for designing high-performance passive and packaging structures.关键词
石英玻璃/共面波导/微带环形谐振器/V波段/W波段Key words
quartz glass/coplanar waveguide/microstrip ring resonator/V-band/W-band分类
信息技术与安全科学引用本文复制引用
朱香宝,孙旭,岳海昆,钱凌轩,倪磊..高纯度石英玻璃40～110 GHz频段电参数的表征[J].红外与毫米波学报,2023,42(4):490-496,7.
