计量学报2023,Vol.44Issue(8):1159-1162,4.DOI:10.3969/j.issn.1000-1158.2023.08.01
电感型光学超导转变边沿探测器件光学谐振腔设计
Design of Optical Resonant Cavities for Inductive Type Optical Superconducting Transition Edge Detector Devices
摘要
关键词
计量学/超导转变边沿/超导Nb膜/反射率/光学谐振腔/化学气相沉积/磁控溅射Key words
metrology/superconducting transition edge/superconducting Nb film/reflectivity/optical resonant cavity/chemical vapor deposition/magnetron sputtering分类
通用工业技术引用本文复制引用
王振宇,钟青,曾九孙,李劲劲,徐骁龙,王雪深..电感型光学超导转变边沿探测器件光学谐振腔设计[J].计量学报,2023,44(8):1159-1162,4.基金项目
国家自然科学基金(61901432) (61901432)