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Nanoscale multi-beam lithography of photonic crystals with ultrafast laser

Jiaqun Li Jianfeng Yan Lan Jiang Jiachen Yu Heng Guo Liangti Qu

光：科学与应用（英文版）2023，Vol.12Issue(8)：1604-1615,12.

光：科学与应用（英文版）2023，Vol.12Issue(8)：1604-1615,12.DOI:10.1038/s41377-023-01178-3

Nanoscale multi-beam lithography of photonic crystals with ultrafast laser

Jiaqun Li ¹Jianfeng Yan ¹Lan Jiang ²Jiachen Yu ¹Heng Guo ¹Liangti Qu³

作者信息

1. State Key Laboratory of Tribology in Advanced Equipment,Department of Mechanical Engineering,Tsinghua University,Beijing 100084,China
2. School of Mechanical Engineering,Beijing Institute of Technology,Beijing 100081,China
3. Department of Chemistry,Tsinghua University,Beijing 100084,China
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摘要

引用本文复制引用

Jiaqun Li,Jianfeng Yan,Lan Jiang,Jiachen Yu,Heng Guo,Liangti Qu..Nanoscale multi-beam lithography of photonic crystals with ultrafast laser[J].光：科学与应用（英文版）,2023,12(8):1604-1615,12.

基金项目

This work is supported by the National Natural Science Foundation of China(Grant no.52075289). （Grant no.52075289）

光：科学与应用（英文版）

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ISSN：2095-5545

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